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In this group enter the functions by which it is studied the stability of
coatings to the errors in:
 | geometrical thicknesses; |
| optical constants; |
| incidence angle; |
| geometrical coefficients (tooling factors) of evaporation sources. |
| NOTE. This functions have an general application. Don't forget that
the errors which can appear in production process depend on the controlling
method and on the performance of your vacuum systems. Errors stability can be
studied better with simulation of photometric control with errors in optical
constants, stop evaporation and even variation of geometrical coefficients. If
the STRAT it is the software used to control the evaporation process then can
be used directly these functions. |
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